JPS6366128U - - Google Patents

Info

Publication number
JPS6366128U
JPS6366128U JP16045886U JP16045886U JPS6366128U JP S6366128 U JPS6366128 U JP S6366128U JP 16045886 U JP16045886 U JP 16045886U JP 16045886 U JP16045886 U JP 16045886U JP S6366128 U JPS6366128 U JP S6366128U
Authority
JP
Japan
Prior art keywords
adsorption tower
adsorbent
container
view
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16045886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532182Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986160458U priority Critical patent/JPH0532182Y2/ja
Publication of JPS6366128U publication Critical patent/JPS6366128U/ja
Application granted granted Critical
Publication of JPH0532182Y2 publication Critical patent/JPH0532182Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Separation Of Gases By Adsorption (AREA)
JP1986160458U 1986-10-20 1986-10-20 Expired - Lifetime JPH0532182Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986160458U JPH0532182Y2 (en]) 1986-10-20 1986-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986160458U JPH0532182Y2 (en]) 1986-10-20 1986-10-20

Publications (2)

Publication Number Publication Date
JPS6366128U true JPS6366128U (en]) 1988-05-02
JPH0532182Y2 JPH0532182Y2 (en]) 1993-08-18

Family

ID=31085858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986160458U Expired - Lifetime JPH0532182Y2 (en]) 1986-10-20 1986-10-20

Country Status (1)

Country Link
JP (1) JPH0532182Y2 (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022965A (ja) * 1983-07-18 1985-02-05 Canon Inc 塗布方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022965A (ja) * 1983-07-18 1985-02-05 Canon Inc 塗布方法

Also Published As

Publication number Publication date
JPH0532182Y2 (en]) 1993-08-18

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